

The global Automatic Wafer Defect Inspection System market size is predicted to grow from US$ 9709 million in 2025 to US$ 18330 million in 2031; it is expected to grow at a CAGR of 11.2% from 2025 to 2031.
Automatic wafer defect inspection system is a specialized equipment used in semiconductor manufacturing to automatically inspect semiconductor wafers for defects and anomalies. Semiconductor wafers are thin slices of semiconductor material used as the substrate for fabricating integrated circuits and other microelectronic devices. The automatic defect inspection system plays a crucial role in ensuring the quality and reliability of semiconductor devices by detecting and classifying defects that may occur during the manufacturing process.
Global key players of Automatic Wafer Defect Inspection System include KLA Corporation, Lasertec, Applied Materials, etc. The top three players hold a share over 61%. Asia Pacific is the largest market, and has a share about 79%, followed by North America and Europe with share 12% and 7%, separately. In terms of product type, Optical Inspection System is the largest segment, occupied for a share of 81%. In terms of application, Foundry has a share about 75 percent.
The “Automatic Wafer Defect Inspection System Industry Forecast” looks at past sales and reviews total world Automatic Wafer Defect Inspection System sales in 2024, providing a comprehensive analysis by region and market sector of projected Automatic Wafer Defect Inspection System sales for 2025 through 2031. With Automatic Wafer Defect Inspection System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Automatic Wafer Defect Inspection System industry.
This Insight Report provides a comprehensive analysis of the global Automatic Wafer Defect Inspection System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Automatic Wafer Defect Inspection System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Automatic Wafer Defect Inspection System market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Automatic Wafer Defect Inspection System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Automatic Wafer Defect Inspection System.
This report presents a comprehensive overview, market shares, and growth opportunities of Automatic Wafer Defect Inspection System market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Optical Inspection System
e-Beam Inspection System
X-ray Inspection System
Segmentation by Application:
IDM
Foundry
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
KLA Corporation
Applied Materials
Lasertec
Hitachi High-Tech Corporation
ASML
Onto Innovation
Camtek
ZEISS
SCREEN Semiconductor Solutions
NEXTIN
Toray Engineering
Muetec
Microtronic
Key Questions Addressed in this Report
What is the 10-year outlook for the global Automatic Wafer Defect Inspection System market?
What factors are driving Automatic Wafer Defect Inspection System market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Automatic Wafer Defect Inspection System market opportunities vary by end market size?
How does Automatic Wafer Defect Inspection System break out by Type, by Application?
Please Note - This is an on demand report and will be delivered in 2 business days (48 hours) post payment.
1 Scope of the Report
1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats
2 Executive Summary
2.1 World Market Overview
2.1.1 Global Automatic Wafer Defect Inspection System Annual Sales 2020-2031
2.1.2 World Current & Future Analysis for Automatic Wafer Defect Inspection System by Geographic Region, 2020, 2024 & 2031
2.1.3 World Current & Future Analysis for Automatic Wafer Defect Inspection System by Country/Region, 2020, 2024 & 2031
2.2 Automatic Wafer Defect Inspection System Segment by Type
2.2.1 Optical Inspection System
2.2.2 e-Beam Inspection System
2.2.3 X-ray Inspection System
2.3 Automatic Wafer Defect Inspection System Sales by Type
2.3.1 Global Automatic Wafer Defect Inspection System Sales Market Share by Type (2020-2025)
2.3.2 Global Automatic Wafer Defect Inspection System Revenue and Market Share by Type (2020-2025)
2.3.3 Global Automatic Wafer Defect Inspection System Sale Price by Type (2020-2025)
2.4 Automatic Wafer Defect Inspection System Segment by Application
2.4.1 IDM
2.4.2 Foundry
2.5 Automatic Wafer Defect Inspection System Sales by Application
2.5.1 Global Automatic Wafer Defect Inspection System Sale Market Share by Application (2020-2025)
2.5.2 Global Automatic Wafer Defect Inspection System Revenue and Market Share by Application (2020-2025)
2.5.3 Global Automatic Wafer Defect Inspection System Sale Price by Application (2020-2025)
3 Global by Company
3.1 Global Automatic Wafer Defect Inspection System Breakdown Data by Company
3.1.1 Global Automatic Wafer Defect Inspection System Annual Sales by Company (2020-2025)
3.1.2 Global Automatic Wafer Defect Inspection System Sales Market Share by Company (2020-2025)
3.2 Global Automatic Wafer Defect Inspection System Annual Revenue by Company (2020-2025)
3.2.1 Global Automatic Wafer Defect Inspection System Revenue by Company (2020-2025)
3.2.2 Global Automatic Wafer Defect Inspection System Revenue Market Share by Company (2020-2025)
3.3 Global Automatic Wafer Defect Inspection System Sale Price by Company
3.4 Key Manufacturers Automatic Wafer Defect Inspection System Producing Area Distribution, Sales Area, Product Type
3.4.1 Key Manufacturers Automatic Wafer Defect Inspection System Product Location Distribution
3.4.2 Players Automatic Wafer Defect Inspection System Products Offered
3.5 Market Concentration Rate Analysis
3.5.1 Competition Landscape Analysis
3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy
4 World Historic Review for Automatic Wafer Defect Inspection System by Geographic Region
4.1 World Historic Automatic Wafer Defect Inspection System Market Size by Geographic Region (2020-2025)
4.1.1 Global Automatic Wafer Defect Inspection System Annual Sales by Geographic Region (2020-2025)
4.1.2 Global Automatic Wafer Defect Inspection System Annual Revenue by Geographic Region (2020-2025)
4.2 World Historic Automatic Wafer Defect Inspection System Market Size by Country/Region (2020-2025)
4.2.1 Global Automatic Wafer Defect Inspection System Annual Sales by Country/Region (2020-2025)
4.2.2 Global Automatic Wafer Defect Inspection System Annual Revenue by Country/Region (2020-2025)
4.3 Americas Automatic Wafer Defect Inspection System Sales Growth
4.4 APAC Automatic Wafer Defect Inspection System Sales Growth
4.5 Europe Automatic Wafer Defect Inspection System Sales Growth
4.6 Middle East & Africa Automatic Wafer Defect Inspection System Sales Growth
5 Americas
5.1 Americas Automatic Wafer Defect Inspection System Sales by Country
5.1.1 Americas Automatic Wafer Defect Inspection System Sales by Country (2020-2025)
5.1.2 Americas Automatic Wafer Defect Inspection System Revenue by Country (2020-2025)
5.2 Americas Automatic Wafer Defect Inspection System Sales by Type (2020-2025)
5.3 Americas Automatic Wafer Defect Inspection System Sales by Application (2020-2025)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil
6 APAC
6.1 APAC Automatic Wafer Defect Inspection System Sales by Region
6.1.1 APAC Automatic Wafer Defect Inspection System Sales by Region (2020-2025)
6.1.2 APAC Automatic Wafer Defect Inspection System Revenue by Region (2020-2025)
6.2 APAC Automatic Wafer Defect Inspection System Sales by Type (2020-2025)
6.3 APAC Automatic Wafer Defect Inspection System Sales by Application (2020-2025)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan
7 Europe
7.1 Europe Automatic Wafer Defect Inspection System by Country
7.1.1 Europe Automatic Wafer Defect Inspection System Sales by Country (2020-2025)
7.1.2 Europe Automatic Wafer Defect Inspection System Revenue by Country (2020-2025)
7.2 Europe Automatic Wafer Defect Inspection System Sales by Type (2020-2025)
7.3 Europe Automatic Wafer Defect Inspection System Sales by Application (2020-2025)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia
8 Middle East & Africa
8.1 Middle East & Africa Automatic Wafer Defect Inspection System by Country
8.1.1 Middle East & Africa Automatic Wafer Defect Inspection System Sales by Country (2020-2025)
8.1.2 Middle East & Africa Automatic Wafer Defect Inspection System Revenue by Country (2020-2025)
8.2 Middle East & Africa Automatic Wafer Defect Inspection System Sales by Type (2020-2025)
8.3 Middle East & Africa Automatic Wafer Defect Inspection System Sales by Application (2020-2025)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries
9 Market Drivers, Challenges and Trends
9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends
10 Manufacturing Cost Structure Analysis
10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Automatic Wafer Defect Inspection System
10.3 Manufacturing Process Analysis of Automatic Wafer Defect Inspection System
10.4 Industry Chain Structure of Automatic Wafer Defect Inspection System
11 Marketing, Distributors and Customer
11.1 Sales Channel
11.1.1 Direct Channels
11.1.2 Indirect Channels
11.2 Automatic Wafer Defect Inspection System Distributors
11.3 Automatic Wafer Defect Inspection System Customer
12 World Forecast Review for Automatic Wafer Defect Inspection System by Geographic Region
12.1 Global Automatic Wafer Defect Inspection System Market Size Forecast by Region
12.1.1 Global Automatic Wafer Defect Inspection System Forecast by Region (2026-2031)
12.1.2 Global Automatic Wafer Defect Inspection System Annual Revenue Forecast by Region (2026-2031)
12.2 Americas Forecast by Country (2026-2031)
12.3 APAC Forecast by Region (2026-2031)
12.4 Europe Forecast by Country (2026-2031)
12.5 Middle East & Africa Forecast by Country (2026-2031)
12.6 Global Automatic Wafer Defect Inspection System Forecast by Type (2026-2031)
12.7 Global Automatic Wafer Defect Inspection System Forecast by Application (2026-2031)
13 Key Players Analysis
13.1 KLA Corporation
13.1.1 KLA Corporation Company Information
13.1.2 KLA Corporation Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.1.3 KLA Corporation Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.1.4 KLA Corporation Main Business Overview
13.1.5 KLA Corporation Latest Developments
13.2 Applied Materials
13.2.1 Applied Materials Company Information
13.2.2 Applied Materials Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.2.3 Applied Materials Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.2.4 Applied Materials Main Business Overview
13.2.5 Applied Materials Latest Developments
13.3 Lasertec
13.3.1 Lasertec Company Information
13.3.2 Lasertec Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.3.3 Lasertec Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.3.4 Lasertec Main Business Overview
13.3.5 Lasertec Latest Developments
13.4 Hitachi High-Tech Corporation
13.4.1 Hitachi High-Tech Corporation Company Information
13.4.2 Hitachi High-Tech Corporation Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.4.3 Hitachi High-Tech Corporation Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.4.4 Hitachi High-Tech Corporation Main Business Overview
13.4.5 Hitachi High-Tech Corporation Latest Developments
13.5 ASML
13.5.1 ASML Company Information
13.5.2 ASML Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.5.3 ASML Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.5.4 ASML Main Business Overview
13.5.5 ASML Latest Developments
13.6 Onto Innovation
13.6.1 Onto Innovation Company Information
13.6.2 Onto Innovation Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.6.3 Onto Innovation Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.6.4 Onto Innovation Main Business Overview
13.6.5 Onto Innovation Latest Developments
13.7 Camtek
13.7.1 Camtek Company Information
13.7.2 Camtek Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.7.3 Camtek Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.7.4 Camtek Main Business Overview
13.7.5 Camtek Latest Developments
13.8 ZEISS
13.8.1 ZEISS Company Information
13.8.2 ZEISS Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.8.3 ZEISS Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.8.4 ZEISS Main Business Overview
13.8.5 ZEISS Latest Developments
13.9 SCREEN Semiconductor Solutions
13.9.1 SCREEN Semiconductor Solutions Company Information
13.9.2 SCREEN Semiconductor Solutions Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.9.3 SCREEN Semiconductor Solutions Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.9.4 SCREEN Semiconductor Solutions Main Business Overview
13.9.5 SCREEN Semiconductor Solutions Latest Developments
13.10 NEXTIN
13.10.1 NEXTIN Company Information
13.10.2 NEXTIN Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.10.3 NEXTIN Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.10.4 NEXTIN Main Business Overview
13.10.5 NEXTIN Latest Developments
13.11 Toray Engineering
13.11.1 Toray Engineering Company Information
13.11.2 Toray Engineering Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.11.3 Toray Engineering Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.11.4 Toray Engineering Main Business Overview
13.11.5 Toray Engineering Latest Developments
13.12 Muetec
13.12.1 Muetec Company Information
13.12.2 Muetec Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.12.3 Muetec Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.12.4 Muetec Main Business Overview
13.12.5 Muetec Latest Developments
13.13 Microtronic
13.13.1 Microtronic Company Information
13.13.2 Microtronic Automatic Wafer Defect Inspection System Product Portfolios and Specifications
13.13.3 Microtronic Automatic Wafer Defect Inspection System Sales, Revenue, Price and Gross Margin (2020-2025)
13.13.4 Microtronic Main Business Overview
13.13.5 Microtronic Latest Developments
14 Research Findings and Conclusion
*If Applicable.