

The global Plasma Etch System market size is predicted to grow from US$ 8656 million in 2025 to US$ 17990 million in 2031; it is expected to grow at a CAGR of 13.0% from 2025 to 2031.
This report studies the Plasma Etch System market. Plasma Etching System is a series of devices and equipment used together to perform plasma etching.
Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample. The plasma source, known as etch species, can be either charged (ions) or neutral (atoms and radicals). During the process, the plasma generates volatile etch products at room temperature from the chemical reactions between the elements of the material etched and the reactive species generated by the plasma. Eventually the atoms of the shot element embed themselves at or just below the surface of the target, thus modifying the physical properties of the target.
North America is the largest market with about 51% market share. Japan is follower, accounting for about 20% market share.
The key players are Oxford Instruments, ULVAC, Lam Research, AMEC, PlasmaTherm, SAMCO Inc., Applied Materials, Inc., Sentech, SPTS Technologies (an Orbotech Company), GigaLane, CORIAL, Trion Technology, NAURA, Plasma Etch, Inc., Tokyo Electron Limited etc. Top 3 companies occupied about 18% market share.
The “Plasma Etch System Industry Forecast” looks at past sales and reviews total world Plasma Etch System sales in 2024, providing a comprehensive analysis by region and market sector of projected Plasma Etch System sales for 2025 through 2031. With Plasma Etch System sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Plasma Etch System industry.
This Insight Report provides a comprehensive analysis of the global Plasma Etch System landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Plasma Etch System portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Plasma Etch System market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Plasma Etch System and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Plasma Etch System.
This report presents a comprehensive overview, market shares, and growth opportunities of Plasma Etch System market by product type, application, key manufacturers and key regions and countries.
Segmentation by Type:
Inductively Coupled Plasma (ICP)
Reactive Ion Etching (RIE)
Deep Reactive Ion Etching (DRIE)
Others
Segmentation by Application:
Semiconductor Industry
Medical Industry
Electronics & Microelectronics
Others
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analysing the company's coverage, product portfolio, its market penetration.
Oxford Instruments
ULVAC
Lam Research
AMEC
PlasmaTherm
SAMCO Inc.
Applied Materials, Inc.
Sentech
SPTS Technologies (an Orbotech Company)
GigaLane
CORIAL
Trion Technology
NAURA
Plasma Etch, Inc.
Tokyo Electron Limited
Key Questions Addressed in this Report
What is the 10-year outlook for the global Plasma Etch System market?
What factors are driving Plasma Etch System market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Plasma Etch System market opportunities vary by end market size?
How does Plasma Etch System break out by Type, by Application?
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1 Scope of the Report
1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats
2 Executive Summary
2.1 World Market Overview
2.1.1 Global Plasma Etch System Annual Sales 2020-2031
2.1.2 World Current & Future Analysis for Plasma Etch System by Geographic Region, 2020, 2024 & 2031
2.1.3 World Current & Future Analysis for Plasma Etch System by Country/Region, 2020, 2024 & 2031
2.2 Plasma Etch System Segment by Type
2.2.1 Inductively Coupled Plasma (ICP)
2.2.2 Reactive Ion Etching (RIE)
2.2.3 Deep Reactive Ion Etching (DRIE)
2.2.4 Others
2.3 Plasma Etch System Sales by Type
2.3.1 Global Plasma Etch System Sales Market Share by Type (2020-2025)
2.3.2 Global Plasma Etch System Revenue and Market Share by Type (2020-2025)
2.3.3 Global Plasma Etch System Sale Price by Type (2020-2025)
2.4 Plasma Etch System Segment by Application
2.4.1 Semiconductor Industry
2.4.2 Medical Industry
2.4.3 Electronics & Microelectronics
2.4.4 Others
2.5 Plasma Etch System Sales by Application
2.5.1 Global Plasma Etch System Sale Market Share by Application (2020-2025)
2.5.2 Global Plasma Etch System Revenue and Market Share by Application (2020-2025)
2.5.3 Global Plasma Etch System Sale Price by Application (2020-2025)
3 Global by Company
3.1 Global Plasma Etch System Breakdown Data by Company
3.1.1 Global Plasma Etch System Annual Sales by Company (2020-2025)
3.1.2 Global Plasma Etch System Sales Market Share by Company (2020-2025)
3.2 Global Plasma Etch System Annual Revenue by Company (2020-2025)
3.2.1 Global Plasma Etch System Revenue by Company (2020-2025)
3.2.2 Global Plasma Etch System Revenue Market Share by Company (2020-2025)
3.3 Global Plasma Etch System Sale Price by Company
3.4 Key Manufacturers Plasma Etch System Producing Area Distribution, Sales Area, Product Type
3.4.1 Key Manufacturers Plasma Etch System Product Location Distribution
3.4.2 Players Plasma Etch System Products Offered
3.5 Market Concentration Rate Analysis
3.5.1 Competition Landscape Analysis
3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2023-2025)
3.6 New Products and Potential Entrants
3.7 Market M&A Activity & Strategy
4 World Historic Review for Plasma Etch System by Geographic Region
4.1 World Historic Plasma Etch System Market Size by Geographic Region (2020-2025)
4.1.1 Global Plasma Etch System Annual Sales by Geographic Region (2020-2025)
4.1.2 Global Plasma Etch System Annual Revenue by Geographic Region (2020-2025)
4.2 World Historic Plasma Etch System Market Size by Country/Region (2020-2025)
4.2.1 Global Plasma Etch System Annual Sales by Country/Region (2020-2025)
4.2.2 Global Plasma Etch System Annual Revenue by Country/Region (2020-2025)
4.3 Americas Plasma Etch System Sales Growth
4.4 APAC Plasma Etch System Sales Growth
4.5 Europe Plasma Etch System Sales Growth
4.6 Middle East & Africa Plasma Etch System Sales Growth
5 Americas
5.1 Americas Plasma Etch System Sales by Country
5.1.1 Americas Plasma Etch System Sales by Country (2020-2025)
5.1.2 Americas Plasma Etch System Revenue by Country (2020-2025)
5.2 Americas Plasma Etch System Sales by Type (2020-2025)
5.3 Americas Plasma Etch System Sales by Application (2020-2025)
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil
6 APAC
6.1 APAC Plasma Etch System Sales by Region
6.1.1 APAC Plasma Etch System Sales by Region (2020-2025)
6.1.2 APAC Plasma Etch System Revenue by Region (2020-2025)
6.2 APAC Plasma Etch System Sales by Type (2020-2025)
6.3 APAC Plasma Etch System Sales by Application (2020-2025)
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan
7 Europe
7.1 Europe Plasma Etch System by Country
7.1.1 Europe Plasma Etch System Sales by Country (2020-2025)
7.1.2 Europe Plasma Etch System Revenue by Country (2020-2025)
7.2 Europe Plasma Etch System Sales by Type (2020-2025)
7.3 Europe Plasma Etch System Sales by Application (2020-2025)
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia
8 Middle East & Africa
8.1 Middle East & Africa Plasma Etch System by Country
8.1.1 Middle East & Africa Plasma Etch System Sales by Country (2020-2025)
8.1.2 Middle East & Africa Plasma Etch System Revenue by Country (2020-2025)
8.2 Middle East & Africa Plasma Etch System Sales by Type (2020-2025)
8.3 Middle East & Africa Plasma Etch System Sales by Application (2020-2025)
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries
9 Market Drivers, Challenges and Trends
9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends
10 Manufacturing Cost Structure Analysis
10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Plasma Etch System
10.3 Manufacturing Process Analysis of Plasma Etch System
10.4 Industry Chain Structure of Plasma Etch System
11 Marketing, Distributors and Customer
11.1 Sales Channel
11.1.1 Direct Channels
11.1.2 Indirect Channels
11.2 Plasma Etch System Distributors
11.3 Plasma Etch System Customer
12 World Forecast Review for Plasma Etch System by Geographic Region
12.1 Global Plasma Etch System Market Size Forecast by Region
12.1.1 Global Plasma Etch System Forecast by Region (2026-2031)
12.1.2 Global Plasma Etch System Annual Revenue Forecast by Region (2026-2031)
12.2 Americas Forecast by Country (2026-2031)
12.3 APAC Forecast by Region (2026-2031)
12.4 Europe Forecast by Country (2026-2031)
12.5 Middle East & Africa Forecast by Country (2026-2031)
12.6 Global Plasma Etch System Forecast by Type (2026-2031)
12.7 Global Plasma Etch System Forecast by Application (2026-2031)
13 Key Players Analysis
13.1 Oxford Instruments
13.1.1 Oxford Instruments Company Information
13.1.2 Oxford Instruments Plasma Etch System Product Portfolios and Specifications
13.1.3 Oxford Instruments Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.1.4 Oxford Instruments Main Business Overview
13.1.5 Oxford Instruments Latest Developments
13.2 ULVAC
13.2.1 ULVAC Company Information
13.2.2 ULVAC Plasma Etch System Product Portfolios and Specifications
13.2.3 ULVAC Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.2.4 ULVAC Main Business Overview
13.2.5 ULVAC Latest Developments
13.3 Lam Research
13.3.1 Lam Research Company Information
13.3.2 Lam Research Plasma Etch System Product Portfolios and Specifications
13.3.3 Lam Research Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.3.4 Lam Research Main Business Overview
13.3.5 Lam Research Latest Developments
13.4 AMEC
13.4.1 AMEC Company Information
13.4.2 AMEC Plasma Etch System Product Portfolios and Specifications
13.4.3 AMEC Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.4.4 AMEC Main Business Overview
13.4.5 AMEC Latest Developments
13.5 PlasmaTherm
13.5.1 PlasmaTherm Company Information
13.5.2 PlasmaTherm Plasma Etch System Product Portfolios and Specifications
13.5.3 PlasmaTherm Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.5.4 PlasmaTherm Main Business Overview
13.5.5 PlasmaTherm Latest Developments
13.6 SAMCO Inc.
13.6.1 SAMCO Inc. Company Information
13.6.2 SAMCO Inc. Plasma Etch System Product Portfolios and Specifications
13.6.3 SAMCO Inc. Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.6.4 SAMCO Inc. Main Business Overview
13.6.5 SAMCO Inc. Latest Developments
13.7 Applied Materials, Inc.
13.7.1 Applied Materials, Inc. Company Information
13.7.2 Applied Materials, Inc. Plasma Etch System Product Portfolios and Specifications
13.7.3 Applied Materials, Inc. Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.7.4 Applied Materials, Inc. Main Business Overview
13.7.5 Applied Materials, Inc. Latest Developments
13.8 Sentech
13.8.1 Sentech Company Information
13.8.2 Sentech Plasma Etch System Product Portfolios and Specifications
13.8.3 Sentech Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.8.4 Sentech Main Business Overview
13.8.5 Sentech Latest Developments
13.9 SPTS Technologies (an Orbotech Company)
13.9.1 SPTS Technologies (an Orbotech Company) Company Information
13.9.2 SPTS Technologies (an Orbotech Company) Plasma Etch System Product Portfolios and Specifications
13.9.3 SPTS Technologies (an Orbotech Company) Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.9.4 SPTS Technologies (an Orbotech Company) Main Business Overview
13.9.5 SPTS Technologies (an Orbotech Company) Latest Developments
13.10 GigaLane
13.10.1 GigaLane Company Information
13.10.2 GigaLane Plasma Etch System Product Portfolios and Specifications
13.10.3 GigaLane Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.10.4 GigaLane Main Business Overview
13.10.5 GigaLane Latest Developments
13.11 CORIAL
13.11.1 CORIAL Company Information
13.11.2 CORIAL Plasma Etch System Product Portfolios and Specifications
13.11.3 CORIAL Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.11.4 CORIAL Main Business Overview
13.11.5 CORIAL Latest Developments
13.12 Trion Technology
13.12.1 Trion Technology Company Information
13.12.2 Trion Technology Plasma Etch System Product Portfolios and Specifications
13.12.3 Trion Technology Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.12.4 Trion Technology Main Business Overview
13.12.5 Trion Technology Latest Developments
13.13 NAURA
13.13.1 NAURA Company Information
13.13.2 NAURA Plasma Etch System Product Portfolios and Specifications
13.13.3 NAURA Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.13.4 NAURA Main Business Overview
13.13.5 NAURA Latest Developments
13.14 Plasma Etch, Inc.
13.14.1 Plasma Etch, Inc. Company Information
13.14.2 Plasma Etch, Inc. Plasma Etch System Product Portfolios and Specifications
13.14.3 Plasma Etch, Inc. Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.14.4 Plasma Etch, Inc. Main Business Overview
13.14.5 Plasma Etch, Inc. Latest Developments
13.15 Tokyo Electron Limited
13.15.1 Tokyo Electron Limited Company Information
13.15.2 Tokyo Electron Limited Plasma Etch System Product Portfolios and Specifications
13.15.3 Tokyo Electron Limited Plasma Etch System Sales, Revenue, Price and Gross Margin (2020-2025)
13.15.4 Tokyo Electron Limited Main Business Overview
13.15.5 Tokyo Electron Limited Latest Developments
14 Research Findings and Conclusion
*If Applicable.