

Reactive Ion Etching (RIE) is a dry etching technique widely used in semiconductor manufacturing, MEMS fabrication, microfabrication and nanotechnology to create patterns on the surface of various materials with high resolution and anisotropy. Unlike wet etching methods involving chemical reactions with liquid etchants, RIE uses reactive gases in a plasma state to chemically and physically remove the material from the surface. The use of reactive gases enables RIE to offer better control and precision over the etching process compared to other methods. The RIE process starts by placing a substrate, typically a silicon wafer covered with a patterned mask, inside a vacuum chamber. Reactive gases are then introduced into the chamber, and plasma is generated by applying an electric field using electrodes. The plasma consists of a mixture of ions, free electrons, and neutral particles. The electric field accelerates the ions in the plasma towards the substrate, resulting in both chemical reactions and physical sputtering at the surface. The combination of these two mechanisms removes the material selectively to create the desired pattern. One of the most significant benefits of RIE over other chemical etching methods is its ability to achieve high etch rates and anisotropy. The ion bombardment in RIE allows better control of the etching direction compared to isotropic plasma etching. The direction control results in sharp and well-defined features with minimal undercutting. Additionally, RIE is a versatile technique that can be used on materials including metals, semiconductors, and insulators in several applications. Furthermore, RIE etching is a dry etching method that avoids drawbacks associated with wet etching like contamination and the handling of hazardous chemicals.
The global Reactive Ion Etching (RIE) market size is projected to grow from US$ million in 2023 to US$ million in 2030; it is expected to grow at a CAGR of % from 2024 to 2030.
The “Reactive Ion Etching (RIE) Industry Forecast” looks at past sales and reviews total world Reactive Ion Etching (RIE) sales in 2023, providing a comprehensive analysis by region and market sector of projected Reactive Ion Etching (RIE) sales for 2024 through 2030. With Reactive Ion Etching (RIE) sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world Reactive Ion Etching (RIE) industry.
This Insight Report provides a comprehensive analysis of the global Reactive Ion Etching (RIE) landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyzes the strategies of leading global companies with a focus on Reactive Ion Etching (RIE) portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global Reactive Ion Etching (RIE) market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for Reactive Ion Etching (RIE) and breaks down the forecast by Type, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global Reactive Ion Etching (RIE).
United States market for Reactive Ion Etching (RIE) is estimated to increase from US$ million in 2023 to US$ million by 2030, at a CAGR of % from 2024 through 2030.
China market for Reactive Ion Etching (RIE) is estimated to increase from US$ million in 2023 to US$ million by 2030, at a CAGR of % from 2024 through 2030.
Europe market for Reactive Ion Etching (RIE) is estimated to increase from US$ million in 2023 to US$ million by 2030, at a CAGR of % from 2024 through 2030.
Global key Reactive Ion Etching (RIE) players cover Lam Research, Oxford Instruments, PlasmaTherm, SAMCO Inc. and Applied Materials, Inc., etc. In terms of revenue, the global two largest companies occupied for a share nearly % in 2023.
This report presents a comprehensive overview, market shares, and growth opportunities of Reactive Ion Etching (RIE) market by product type, application, key manufacturers and key regions and countries.
Segmentation by type
Load-lock ICP Etch Systems
Atmospheric Cassette ICP-RIE Systems
Segmentation by application
Semiconductor Manufacturing
MEMS Fabrication
Nanotechnology and Nanofabrication
Photonics and Optoelectronics
Surface Modification and Functionalization
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analyzing the company's coverage, product portfolio, its market penetration.
Lam Research
Oxford Instruments
PlasmaTherm
SAMCO Inc.
Applied Materials, Inc.
ULTECH
Weina
SENTECH Instruments GmbH
Key Questions Addressed in this Report
What is the 10-year outlook for the global Reactive Ion Etching (RIE) market?
What factors are driving Reactive Ion Etching (RIE) market growth, globally and by region?
Which technologies are poised for the fastest growth by market and region?
How do Reactive Ion Etching (RIE) market opportunities vary by end market size?
How does Reactive Ion Etching (RIE) break out type, application?
Please Note - This is an on demand report and will be delivered in 2 business days (48 hours) post payment.
1 Scope of the Report
1.1 Market Introduction
1.2 Years Considered
1.3 Research Objectives
1.4 Market Research Methodology
1.5 Research Process and Data Source
1.6 Economic Indicators
1.7 Currency Considered
1.8 Market Estimation Caveats
2 Executive Summary
2.1 World Market Overview
2.1.1 Global Reactive Ion Etching (RIE) Annual Sales 2019-2030
2.1.2 World Current & Future Analysis for Reactive Ion Etching (RIE) by Geographic Region, 2019, 2023 & 2030
2.1.3 World Current & Future Analysis for Reactive Ion Etching (RIE) by Country/Region, 2019, 2023 & 2030
2.2 Reactive Ion Etching (RIE) Segment by Type
2.2.1 Load-lock ICP Etch Systems
2.2.2 Atmospheric Cassette ICP-RIE Systems
2.3 Reactive Ion Etching (RIE) Sales by Type
2.3.1 Global Reactive Ion Etching (RIE) Sales Market Share by Type (2019-2024)
2.3.2 Global Reactive Ion Etching (RIE) Revenue and Market Share by Type (2019-2024)
2.3.3 Global Reactive Ion Etching (RIE) Sale Price by Type (2019-2024)
2.4 Reactive Ion Etching (RIE) Segment by Application
2.4.1 Semiconductor Manufacturing
2.4.2 MEMS Fabrication
2.4.3 Nanotechnology and Nanofabrication
2.4.4 Photonics and Optoelectronics
2.4.5 Surface Modification and Functionalization
2.5 Reactive Ion Etching (RIE) Sales by Application
2.5.1 Global Reactive Ion Etching (RIE) Sale Market Share by Application (2019-2024)
2.5.2 Global Reactive Ion Etching (RIE) Revenue and Market Share by Application (2019-2024)
2.5.3 Global Reactive Ion Etching (RIE) Sale Price by Application (2019-2024)
3 Global Reactive Ion Etching (RIE) by Company
3.1 Global Reactive Ion Etching (RIE) Breakdown Data by Company
3.1.1 Global Reactive Ion Etching (RIE) Annual Sales by Company (2019-2024)
3.1.2 Global Reactive Ion Etching (RIE) Sales Market Share by Company (2019-2024)
3.2 Global Reactive Ion Etching (RIE) Annual Revenue by Company (2019-2024)
3.2.1 Global Reactive Ion Etching (RIE) Revenue by Company (2019-2024)
3.2.2 Global Reactive Ion Etching (RIE) Revenue Market Share by Company (2019-2024)
3.3 Global Reactive Ion Etching (RIE) Sale Price by Company
3.4 Key Manufacturers Reactive Ion Etching (RIE) Producing Area Distribution, Sales Area, Product Type
3.4.1 Key Manufacturers Reactive Ion Etching (RIE) Product Location Distribution
3.4.2 Players Reactive Ion Etching (RIE) Products Offered
3.5 Market Concentration Rate Analysis
3.5.1 Competition Landscape Analysis
3.5.2 Concentration Ratio (CR3, CR5 and CR10) & (2019-2024)
3.6 New Products and Potential Entrants
3.7 Mergers & Acquisitions, Expansion
4 World Historic Review for Reactive Ion Etching (RIE) by Geographic Region
4.1 World Historic Reactive Ion Etching (RIE) Market Size by Geographic Region (2019-2024)
4.1.1 Global Reactive Ion Etching (RIE) Annual Sales by Geographic Region (2019-2024)
4.1.2 Global Reactive Ion Etching (RIE) Annual Revenue by Geographic Region (2019-2024)
4.2 World Historic Reactive Ion Etching (RIE) Market Size by Country/Region (2019-2024)
4.2.1 Global Reactive Ion Etching (RIE) Annual Sales by Country/Region (2019-2024)
4.2.2 Global Reactive Ion Etching (RIE) Annual Revenue by Country/Region (2019-2024)
4.3 Americas Reactive Ion Etching (RIE) Sales Growth
4.4 APAC Reactive Ion Etching (RIE) Sales Growth
4.5 Europe Reactive Ion Etching (RIE) Sales Growth
4.6 Middle East & Africa Reactive Ion Etching (RIE) Sales Growth
5 Americas
5.1 Americas Reactive Ion Etching (RIE) Sales by Country
5.1.1 Americas Reactive Ion Etching (RIE) Sales by Country (2019-2024)
5.1.2 Americas Reactive Ion Etching (RIE) Revenue by Country (2019-2024)
5.2 Americas Reactive Ion Etching (RIE) Sales by Type
5.3 Americas Reactive Ion Etching (RIE) Sales by Application
5.4 United States
5.5 Canada
5.6 Mexico
5.7 Brazil
6 APAC
6.1 APAC Reactive Ion Etching (RIE) Sales by Region
6.1.1 APAC Reactive Ion Etching (RIE) Sales by Region (2019-2024)
6.1.2 APAC Reactive Ion Etching (RIE) Revenue by Region (2019-2024)
6.2 APAC Reactive Ion Etching (RIE) Sales by Type
6.3 APAC Reactive Ion Etching (RIE) Sales by Application
6.4 China
6.5 Japan
6.6 South Korea
6.7 Southeast Asia
6.8 India
6.9 Australia
6.10 China Taiwan
7 Europe
7.1 Europe Reactive Ion Etching (RIE) by Country
7.1.1 Europe Reactive Ion Etching (RIE) Sales by Country (2019-2024)
7.1.2 Europe Reactive Ion Etching (RIE) Revenue by Country (2019-2024)
7.2 Europe Reactive Ion Etching (RIE) Sales by Type
7.3 Europe Reactive Ion Etching (RIE) Sales by Application
7.4 Germany
7.5 France
7.6 UK
7.7 Italy
7.8 Russia
8 Middle East & Africa
8.1 Middle East & Africa Reactive Ion Etching (RIE) by Country
8.1.1 Middle East & Africa Reactive Ion Etching (RIE) Sales by Country (2019-2024)
8.1.2 Middle East & Africa Reactive Ion Etching (RIE) Revenue by Country (2019-2024)
8.2 Middle East & Africa Reactive Ion Etching (RIE) Sales by Type
8.3 Middle East & Africa Reactive Ion Etching (RIE) Sales by Application
8.4 Egypt
8.5 South Africa
8.6 Israel
8.7 Turkey
8.8 GCC Countries
9 Market Drivers, Challenges and Trends
9.1 Market Drivers & Growth Opportunities
9.2 Market Challenges & Risks
9.3 Industry Trends
10 Manufacturing Cost Structure Analysis
10.1 Raw Material and Suppliers
10.2 Manufacturing Cost Structure Analysis of Reactive Ion Etching (RIE)
10.3 Manufacturing Process Analysis of Reactive Ion Etching (RIE)
10.4 Industry Chain Structure of Reactive Ion Etching (RIE)
11 Marketing, Distributors and Customer
11.1 Sales Channel
11.1.1 Direct Channels
11.1.2 Indirect Channels
11.2 Reactive Ion Etching (RIE) Distributors
11.3 Reactive Ion Etching (RIE) Customer
12 World Forecast Review for Reactive Ion Etching (RIE) by Geographic Region
12.1 Global Reactive Ion Etching (RIE) Market Size Forecast by Region
12.1.1 Global Reactive Ion Etching (RIE) Forecast by Region (2025-2030)
12.1.2 Global Reactive Ion Etching (RIE) Annual Revenue Forecast by Region (2025-2030)
12.2 Americas Forecast by Country
12.3 APAC Forecast by Region
12.4 Europe Forecast by Country
12.5 Middle East & Africa Forecast by Country
12.6 Global Reactive Ion Etching (RIE) Forecast by Type
12.7 Global Reactive Ion Etching (RIE) Forecast by Application
13 Key Players Analysis
13.1 Lam Research
13.1.1 Lam Research Company Information
13.1.2 Lam Research Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.1.3 Lam Research Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.1.4 Lam Research Main Business Overview
13.1.5 Lam Research Latest Developments
13.2 Oxford Instruments
13.2.1 Oxford Instruments Company Information
13.2.2 Oxford Instruments Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.2.3 Oxford Instruments Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.2.4 Oxford Instruments Main Business Overview
13.2.5 Oxford Instruments Latest Developments
13.3 PlasmaTherm
13.3.1 PlasmaTherm Company Information
13.3.2 PlasmaTherm Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.3.3 PlasmaTherm Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.3.4 PlasmaTherm Main Business Overview
13.3.5 PlasmaTherm Latest Developments
13.4 SAMCO Inc.
13.4.1 SAMCO Inc. Company Information
13.4.2 SAMCO Inc. Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.4.3 SAMCO Inc. Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.4.4 SAMCO Inc. Main Business Overview
13.4.5 SAMCO Inc. Latest Developments
13.5 Applied Materials, Inc.
13.5.1 Applied Materials, Inc. Company Information
13.5.2 Applied Materials, Inc. Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.5.3 Applied Materials, Inc. Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.5.4 Applied Materials, Inc. Main Business Overview
13.5.5 Applied Materials, Inc. Latest Developments
13.6 ULTECH
13.6.1 ULTECH Company Information
13.6.2 ULTECH Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.6.3 ULTECH Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.6.4 ULTECH Main Business Overview
13.6.5 ULTECH Latest Developments
13.7 Weina
13.7.1 Weina Company Information
13.7.2 Weina Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.7.3 Weina Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.7.4 Weina Main Business Overview
13.7.5 Weina Latest Developments
13.8 SENTECH Instruments GmbH
13.8.1 SENTECH Instruments GmbH Company Information
13.8.2 SENTECH Instruments GmbH Reactive Ion Etching (RIE) Product Portfolios and Specifications
13.8.3 SENTECH Instruments GmbH Reactive Ion Etching (RIE) Sales, Revenue, Price and Gross Margin (2019-2024)
13.8.4 SENTECH Instruments GmbH Main Business Overview
13.8.5 SENTECH Instruments GmbH Latest Developments
14 Research Findings and Conclusion
*If Applicable.