

An Integrated CD (Critical Dimension) Overlay Metrology System is a sophisticated and specialized tool used in the semiconductor manufacturing industry for the precise measurement and characterization of critical dimensions and overlay accuracy on semiconductor wafers. This system is a crucial component in the fabrication process, ensuring the accuracy and uniformity of intricate patterns and features on semiconductor devices. Integrated CD Overlay Metrology Systems utilize advanced imaging and measurement technologies to assess critical dimensions, overlay alignment, and other parameters critical to the performance and functionality of integrated circuits. These systems are integrated into the semiconductor manufacturing workflow, providing in-line measurements that aid in process control and optimization. The term "integrated" emphasizes the seamless incorporation of CD and overlay metrology capabilities into a unified system, allowing for comprehensive monitoring and analysis throughout various stages of semiconductor production. The precise measurements provided by these systems contribute to the manufacturing of high-performance and reliable semiconductor devices, supporting the industry's ongoing efforts to enhance chip density and functionality.
The global Integrated CD Overlay Metrology System market was valued at US$ million in 2023 and is anticipated to reach US$ million by 2030, witnessing a CAGR of % during the forecast period 2024-2030.
The market development status of Integrated CD (Critical Dimension) Overlay Metrology Systems, used in semiconductor manufacturing, indicates a focus on precision and efficiency in the semiconductor industry. These systems play a crucial role in measuring and controlling critical dimensions and overlay accuracy during the semiconductor fabrication process. The market has witnessed a continuous evolution of CD overlay metrology technology to meet the demands of shrinking semiconductor nodes and increasing complexity in chip designs. Current trends emphasize the integration of CD overlay metrology into a unified, comprehensive system to streamline the manufacturing workflow. Future development trends are expected to revolve around advancements in automation, artificial intelligence (AI), and machine learning to enhance the speed and accuracy of measurements. Additionally, there may be a push towards in-line monitoring solutions to enable real-time adjustments and improve overall yield. As semiconductor technologies advance, Integrated CD Overlay Metrology Systems are likely to incorporate new materials and methodologies to address the challenges posed by smaller geometries and emerging technologies, such as EUV lithography. Continuous innovation in metrology capabilities is anticipated to support the semiconductor industry in maintaining high precision and reliability in the production of advanced semiconductor devices.
This report aims to provide a comprehensive presentation of the global market for Integrated CD Overlay Metrology System, with both quantitative and qualitative analysis, to help readers develop business/growth strategies, assess the market competitive situation, analyze their position in the current marketplace, and make informed business decisions regarding Integrated CD Overlay Metrology System.
Report Scope
The Integrated CD Overlay Metrology System market size, estimations, and forecasts are provided in terms of output/shipments (K Units) and revenue ($ millions), considering 2023 as the base year, with history and forecast data for the period from 2019 to 2030. This report segments the global Integrated CD Overlay Metrology System market comprehensively. Regional market sizes, concerning products by Type, by Application, and by players, are also provided.
For a more in-depth understanding of the market, the report provides profiles of the competitive landscape, key competitors, and their respective market ranks. The report also discusses technological trends and new product developments.
The report will help the Integrated CD Overlay Metrology System manufacturers, new entrants, and industry chain related companies in this market with information on the revenues, production, and average price for the overall market and the sub-segments across the different segments, by company, by Type, by Application, and by regions.
Market Segmentation
By Company
KLA
Hitachi
Chroma
Tokyo Aircraft Instrument
ASML
Onto Innovation
Mue Tec
TASMIT
Soluris
ZEISS
Advanced Spectral Technology
Netzer Precision Position Sensors
AUROS Technology
Quality Vision International
Nikon
Veeco Instruments
Nanometrics
SCREEN Semiconductor Solutions
Segment by Type
Vertical Metrology System
Horizontal Metrology System
Segment by Application
200mm Wafer
300mm Wafer
Others
Production by Region
North America
Europe
China
Japan
Consumption by Region
North America
United States
Canada
Europe
Germany
France
U.K.
Italy
Netherlands
Asia-Pacific
China
Japan
South Korea
China Taiwan
Southeast Asia
India
Latin America, Middle East & Africa
Mexico
Brazil
Turkey
GCC Countries
Chapter Outline
Chapter 1: Introduces the report scope of the report, executive summary of different market segments (by region, by Type, by Application, etc), including the market size of each market segment, future development potential, and so on. It offers a high-level view of the current state of the market and its likely evolution in the short to mid-term, and long term.
Chapter 2: Detailed analysis of Integrated CD Overlay Metrology System manufacturers competitive landscape, price, production and value market share, latest development plan, merger, and acquisition information, etc.
Chapter 3: Production/output, value of Integrated CD Overlay Metrology System by region/country. It provides a quantitative analysis of the market size and development potential of each region in the next six years.
Chapter 4: Consumption of Integrated CD Overlay Metrology System in regional level and country level. It provides a quantitative analysis of the market size and development potential of each region and its main countries and introduces the market development, future development prospects, market space, and production of each country in the world.
Chapter 5: Provides the analysis of various market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments.
Chapter 6: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product production/output, value, price, gross margin, product introduction, recent development, etc.
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Introduces the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry.
Chapter 10: The main points and conclusions of the report.
Please Note - This is an on demand report and will be delivered in 2 business days (48 hours) post payment.
1 Integrated CD Overlay Metrology System Market Overview
1.1 Product Definition
1.2 Integrated CD Overlay Metrology System Segment by Type
1.2.1 Global Integrated CD Overlay Metrology System Market Value Growth Rate Analysis by Type 2023 VS 2030
1.2.2 Vertical Metrology System
1.2.3 Horizontal Metrology System
1.3 Integrated CD Overlay Metrology System Segment by Application
1.3.1 Global Integrated CD Overlay Metrology System Market Value Growth Rate Analysis by Application: 2023 VS 2030
1.3.2 200mm Wafer
1.3.3 300mm Wafer
1.3.4 Others
1.4 Global Market Growth Prospects
1.4.1 Global Integrated CD Overlay Metrology System Production Value Estimates and Forecasts (2019-2030)
1.4.2 Global Integrated CD Overlay Metrology System Production Capacity Estimates and Forecasts (2019-2030)
1.4.3 Global Integrated CD Overlay Metrology System Production Estimates and Forecasts (2019-2030)
1.4.4 Global Integrated CD Overlay Metrology System Market Average Price Estimates and Forecasts (2019-2030)
1.5 Assumptions and Limitations
2 Market Competition by Manufacturers
2.1 Global Integrated CD Overlay Metrology System Production Market Share by Manufacturers (2019-2024)
2.2 Global Integrated CD Overlay Metrology System Production Value Market Share by Manufacturers (2019-2024)
2.3 Global Key Players of Integrated CD Overlay Metrology System, Industry Ranking, 2022 VS 2023 VS 2024
2.4 Global Integrated CD Overlay Metrology System Market Share by Company Type (Tier 1, Tier 2 and Tier 3)
2.5 Global Integrated CD Overlay Metrology System Average Price by Manufacturers (2019-2024)
2.6 Global Key Manufacturers of Integrated CD Overlay Metrology System, Manufacturing Base Distribution and Headquarters
2.7 Global Key Manufacturers of Integrated CD Overlay Metrology System, Product Offered and Application
2.8 Global Key Manufacturers of Integrated CD Overlay Metrology System, Date of Enter into This Industry
2.9 Integrated CD Overlay Metrology System Market Competitive Situation and Trends
2.9.1 Integrated CD Overlay Metrology System Market Concentration Rate
2.9.2 Global 5 and 10 Largest Integrated CD Overlay Metrology System Players Market Share by Revenue
2.10 Mergers & Acquisitions, Expansion
3 Integrated CD Overlay Metrology System Production by Region
3.1 Global Integrated CD Overlay Metrology System Production Value Estimates and Forecasts by Region: 2019 VS 2023 VS 2030
3.2 Global Integrated CD Overlay Metrology System Production Value by Region (2019-2030)
3.2.1 Global Integrated CD Overlay Metrology System Production Value Market Share by Region (2019-2024)
3.2.2 Global Forecasted Production Value of Integrated CD Overlay Metrology System by Region (2025-2030)
3.3 Global Integrated CD Overlay Metrology System Production Estimates and Forecasts by Region: 2019 VS 2023 VS 2030
3.4 Global Integrated CD Overlay Metrology System Production by Region (2019-2030)
3.4.1 Global Integrated CD Overlay Metrology System Production Market Share by Region (2019-2024)
3.4.2 Global Forecasted Production of Integrated CD Overlay Metrology System by Region (2025-2030)
3.5 Global Integrated CD Overlay Metrology System Market Price Analysis by Region (2019-2024)
3.6 Global Integrated CD Overlay Metrology System Production and Value, Year-over-Year Growth
3.6.1 North America Integrated CD Overlay Metrology System Production Value Estimates and Forecasts (2019-2030)
3.6.2 Europe Integrated CD Overlay Metrology System Production Value Estimates and Forecasts (2019-2030)
3.6.3 China Integrated CD Overlay Metrology System Production Value Estimates and Forecasts (2019-2030)
3.6.4 Japan Integrated CD Overlay Metrology System Production Value Estimates and Forecasts (2019-2030)
4 Integrated CD Overlay Metrology System Consumption by Region
4.1 Global Integrated CD Overlay Metrology System Consumption Estimates and Forecasts by Region: 2019 VS 2023 VS 2030
4.2 Global Integrated CD Overlay Metrology System Consumption by Region (2019-2030)
4.2.1 Global Integrated CD Overlay Metrology System Consumption by Region (2019-2024)
4.2.2 Global Integrated CD Overlay Metrology System Forecasted Consumption by Region (2025-2030)
4.3 North America
4.3.1 North America Integrated CD Overlay Metrology System Consumption Growth Rate by Country: 2019 VS 2023 VS 2030
4.3.2 North America Integrated CD Overlay Metrology System Consumption by Country (2019-2030)
4.3.3 United States
4.3.4 Canada
4.4 Europe
4.4.1 Europe Integrated CD Overlay Metrology System Consumption Growth Rate by Country: 2019 VS 2023 VS 2030
4.4.2 Europe Integrated CD Overlay Metrology System Consumption by Country (2019-2030)
4.4.3 Germany
4.4.4 France
4.4.5 U.K.
4.4.6 Italy
4.4.7 Netherlands
4.5 Asia Pacific
4.5.1 Asia Pacific Integrated CD Overlay Metrology System Consumption Growth Rate by Region: 2019 VS 2023 VS 2030
4.5.2 Asia Pacific Integrated CD Overlay Metrology System Consumption by Region (2019-2030)
4.5.3 China
4.5.4 Japan
4.5.5 South Korea
4.5.6 China Taiwan
4.5.7 Southeast Asia
4.5.8 India
4.6 Latin America, Middle East & Africa
4.6.1 Latin America, Middle East & Africa Integrated CD Overlay Metrology System Consumption Growth Rate by Country: 2019 VS 2023 VS 2030
4.6.2 Latin America, Middle East & Africa Integrated CD Overlay Metrology System Consumption by Country (2019-2030)
4.6.3 Mexico
4.6.4 Brazil
4.6.5 Turkey
4.6.6 GCC Countries
5 Segment by Type
5.1 Global Integrated CD Overlay Metrology System Production by Type (2019-2030)
5.1.1 Global Integrated CD Overlay Metrology System Production by Type (2019-2024)
5.1.2 Global Integrated CD Overlay Metrology System Production by Type (2025-2030)
5.1.3 Global Integrated CD Overlay Metrology System Production Market Share by Type (2019-2030)
5.2 Global Integrated CD Overlay Metrology System Production Value by Type (2019-2030)
5.2.1 Global Integrated CD Overlay Metrology System Production Value by Type (2019-2024)
5.2.2 Global Integrated CD Overlay Metrology System Production Value by Type (2025-2030)
5.2.3 Global Integrated CD Overlay Metrology System Production Value Market Share by Type (2019-2030)
5.3 Global Integrated CD Overlay Metrology System Price by Type (2019-2030)
6 Segment by Application
6.1 Global Integrated CD Overlay Metrology System Production by Application (2019-2030)
6.1.1 Global Integrated CD Overlay Metrology System Production by Application (2019-2024)
6.1.2 Global Integrated CD Overlay Metrology System Production by Application (2025-2030)
6.1.3 Global Integrated CD Overlay Metrology System Production Market Share by Application (2019-2030)
6.2 Global Integrated CD Overlay Metrology System Production Value by Application (2019-2030)
6.2.1 Global Integrated CD Overlay Metrology System Production Value by Application (2019-2024)
6.2.2 Global Integrated CD Overlay Metrology System Production Value by Application (2025-2030)
6.2.3 Global Integrated CD Overlay Metrology System Production Value Market Share by Application (2019-2030)
6.3 Global Integrated CD Overlay Metrology System Price by Application (2019-2030)
7 Key Companies Profiled
7.1 KLA
7.1.1 KLA Integrated CD Overlay Metrology System Corporation Information
7.1.2 KLA Integrated CD Overlay Metrology System Product Portfolio
7.1.3 KLA Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.1.4 KLA Main Business and Markets Served
7.1.5 KLA Recent Developments/Updates
7.2 Hitachi
7.2.1 Hitachi Integrated CD Overlay Metrology System Corporation Information
7.2.2 Hitachi Integrated CD Overlay Metrology System Product Portfolio
7.2.3 Hitachi Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.2.4 Hitachi Main Business and Markets Served
7.2.5 Hitachi Recent Developments/Updates
7.3 Chroma
7.3.1 Chroma Integrated CD Overlay Metrology System Corporation Information
7.3.2 Chroma Integrated CD Overlay Metrology System Product Portfolio
7.3.3 Chroma Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.3.4 Chroma Main Business and Markets Served
7.3.5 Chroma Recent Developments/Updates
7.4 Tokyo Aircraft Instrument
7.4.1 Tokyo Aircraft Instrument Integrated CD Overlay Metrology System Corporation Information
7.4.2 Tokyo Aircraft Instrument Integrated CD Overlay Metrology System Product Portfolio
7.4.3 Tokyo Aircraft Instrument Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.4.4 Tokyo Aircraft Instrument Main Business and Markets Served
7.4.5 Tokyo Aircraft Instrument Recent Developments/Updates
7.5 ASML
7.5.1 ASML Integrated CD Overlay Metrology System Corporation Information
7.5.2 ASML Integrated CD Overlay Metrology System Product Portfolio
7.5.3 ASML Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.5.4 ASML Main Business and Markets Served
7.5.5 ASML Recent Developments/Updates
7.6 Onto Innovation
7.6.1 Onto Innovation Integrated CD Overlay Metrology System Corporation Information
7.6.2 Onto Innovation Integrated CD Overlay Metrology System Product Portfolio
7.6.3 Onto Innovation Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.6.4 Onto Innovation Main Business and Markets Served
7.6.5 Onto Innovation Recent Developments/Updates
7.7 Mue Tec
7.7.1 Mue Tec Integrated CD Overlay Metrology System Corporation Information
7.7.2 Mue Tec Integrated CD Overlay Metrology System Product Portfolio
7.7.3 Mue Tec Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.7.4 Mue Tec Main Business and Markets Served
7.7.5 Mue Tec Recent Developments/Updates
7.8 TASMIT
7.8.1 TASMIT Integrated CD Overlay Metrology System Corporation Information
7.8.2 TASMIT Integrated CD Overlay Metrology System Product Portfolio
7.8.3 TASMIT Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.8.4 TASMIT Main Business and Markets Served
7.7.5 TASMIT Recent Developments/Updates
7.9 Soluris
7.9.1 Soluris Integrated CD Overlay Metrology System Corporation Information
7.9.2 Soluris Integrated CD Overlay Metrology System Product Portfolio
7.9.3 Soluris Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.9.4 Soluris Main Business and Markets Served
7.9.5 Soluris Recent Developments/Updates
7.10 ZEISS
7.10.1 ZEISS Integrated CD Overlay Metrology System Corporation Information
7.10.2 ZEISS Integrated CD Overlay Metrology System Product Portfolio
7.10.3 ZEISS Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.10.4 ZEISS Main Business and Markets Served
7.10.5 ZEISS Recent Developments/Updates
7.11 Advanced Spectral Technology
7.11.1 Advanced Spectral Technology Integrated CD Overlay Metrology System Corporation Information
7.11.2 Advanced Spectral Technology Integrated CD Overlay Metrology System Product Portfolio
7.11.3 Advanced Spectral Technology Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.11.4 Advanced Spectral Technology Main Business and Markets Served
7.11.5 Advanced Spectral Technology Recent Developments/Updates
7.12 Netzer Precision Position Sensors
7.12.1 Netzer Precision Position Sensors Integrated CD Overlay Metrology System Corporation Information
7.12.2 Netzer Precision Position Sensors Integrated CD Overlay Metrology System Product Portfolio
7.12.3 Netzer Precision Position Sensors Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.12.4 Netzer Precision Position Sensors Main Business and Markets Served
7.12.5 Netzer Precision Position Sensors Recent Developments/Updates
7.13 AUROS Technology
7.13.1 AUROS Technology Integrated CD Overlay Metrology System Corporation Information
7.13.2 AUROS Technology Integrated CD Overlay Metrology System Product Portfolio
7.13.3 AUROS Technology Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.13.4 AUROS Technology Main Business and Markets Served
7.13.5 AUROS Technology Recent Developments/Updates
7.14 Quality Vision International
7.14.1 Quality Vision International Integrated CD Overlay Metrology System Corporation Information
7.14.2 Quality Vision International Integrated CD Overlay Metrology System Product Portfolio
7.14.3 Quality Vision International Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.14.4 Quality Vision International Main Business and Markets Served
7.14.5 Quality Vision International Recent Developments/Updates
7.15 Nikon
7.15.1 Nikon Integrated CD Overlay Metrology System Corporation Information
7.15.2 Nikon Integrated CD Overlay Metrology System Product Portfolio
7.15.3 Nikon Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.15.4 Nikon Main Business and Markets Served
7.15.5 Nikon Recent Developments/Updates
7.16 Veeco Instruments
7.16.1 Veeco Instruments Integrated CD Overlay Metrology System Corporation Information
7.16.2 Veeco Instruments Integrated CD Overlay Metrology System Product Portfolio
7.16.3 Veeco Instruments Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.16.4 Veeco Instruments Main Business and Markets Served
7.16.5 Veeco Instruments Recent Developments/Updates
7.17 Nanometrics
7.17.1 Nanometrics Integrated CD Overlay Metrology System Corporation Information
7.17.2 Nanometrics Integrated CD Overlay Metrology System Product Portfolio
7.17.3 Nanometrics Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.17.4 Nanometrics Main Business and Markets Served
7.17.5 Nanometrics Recent Developments/Updates
7.18 SCREEN Semiconductor Solutions
7.18.1 SCREEN Semiconductor Solutions Integrated CD Overlay Metrology System Corporation Information
7.18.2 SCREEN Semiconductor Solutions Integrated CD Overlay Metrology System Product Portfolio
7.18.3 SCREEN Semiconductor Solutions Integrated CD Overlay Metrology System Production, Value, Price and Gross Margin (2019-2024)
7.18.4 SCREEN Semiconductor Solutions Main Business and Markets Served
7.18.5 SCREEN Semiconductor Solutions Recent Developments/Updates
8 Industry Chain and Sales Channels Analysis
8.1 Integrated CD Overlay Metrology System Industry Chain Analysis
8.2 Integrated CD Overlay Metrology System Key Raw Materials
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.3 Integrated CD Overlay Metrology System Production Mode & Process
8.4 Integrated CD Overlay Metrology System Sales and Marketing
8.4.1 Integrated CD Overlay Metrology System Sales Channels
8.4.2 Integrated CD Overlay Metrology System Distributors
8.5 Integrated CD Overlay Metrology System Customers
9 Integrated CD Overlay Metrology System Market Dynamics
9.1 Integrated CD Overlay Metrology System Industry Trends
9.2 Integrated CD Overlay Metrology System Market Drivers
9.3 Integrated CD Overlay Metrology System Market Challenges
9.4 Integrated CD Overlay Metrology System Market Restraints
10 Research Finding and Conclusion
11 Methodology and Data Source
11.1 Methodology/Research Approach
11.1.1 Research Programs/Design
11.1.2 Market Size Estimation
11.1.3 Market Breakdown and Data Triangulation
11.2 Data Source
11.2.1 Secondary Sources
11.2.2 Primary Sources
11.3 Author List
11.4 Disclaimer
KLA
Hitachi
Chroma
Tokyo Aircraft Instrument
ASML
Onto Innovation
Mue Tec
TASMIT
Soluris
ZEISS
Advanced Spectral Technology
Netzer Precision Position Sensors
AUROS Technology
Quality Vision International
Nikon
Veeco Instruments
Nanometrics
SCREEN Semiconductor Solutions
Ìý
Ìý
*If Applicable.